КФУ. Карточка публикации. The Effect Magnet Design on Controlling the Target Erosion Profile for DC Magnetron with the Rectangular Target

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THE EFFECT MAGNET DESIGN ON CONTROLLING THE TARGET EROSION PROFILE FOR DC MAGNETRON WITH THE RECTANGULAR TARGET

Форма представления

Статьи в зарубежных журналах и сборниках

Год публикации

2022

Язык

английский

Авторы, сотрудники КФУ

Лучкин Александр Григорьевич, автор

Библиографическое описание на языке оригинала

Ayachi Omar A, Luchkin A.G, Alsayed Omar M.R, The Effect Magnet Design on Controlling the Target Erosion Profile for DC Magnetron with the Rectangular Target//Plasma Chemistry and Plasma Processing. - 2022. - Vol., Is.. - .

Аннотация

Anomalous erosion can happen, in the erosion sections of a rectangular target, resulting in, lower usage of the target. To determine the cause of anomalous erosion, we performed a series of simulations describing the strong and weak magnet field regions for all sections erosion. We found that no-uniform distribution of the magnetic field on the target surface causes the anomalous erosion. To make erosion profile more uniform, we proposed to improve magnets design. Through the 3D-simulation model, the approach of magnets design improvement is verified. We found that making the perpendicular magnetic field distribution more uniform within 10% on the erosion sections, the predicted erosion profile can be better controlled and made more uniform. The target erosion profile is predicted using a non-self-consistent particle simulation where tracing the complex trajectories of magnetized electrons within the magnetic trap and non-magnetized ions that naturally bombard the target surface. The obtained simulation results are consistent with the actual situation in the experimental results and measured data, at least in the relative sense correct in terms of normal erosion profiles, measurement of magnetic field strength on the target surface and erosion depth measurement. The model can provide the total mass lost from target, and service life. ? 2022, The Author(s), under exclusive licence to Springer Science+Business Media, LLC, part of Springer Nature.

Ключевые слова

Erosion, Finite element method, Magnetic field, Magnetron sputtering, Monte Carlo simulation

Название журнала

Plasma Chemistry and Plasma Processing

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85140489106&doi=10.1007%2fs11090-022-10283-x&partnerID=40&md5=a751b9dd7acaa6b8402e102e7d552820

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https://repository.kpfu.ru/?p_id=272408

Полная запись метаданных

Поле DC	Значение	Язык
dc.contributor.author	Лучкин Александр Григорьевич	ru_RU
dc.date.accessioned	2022-01-01T00:00:00Z	ru_RU
dc.date.available	2022-01-01T00:00:00Z	ru_RU
dc.date.issued	2022	ru_RU
dc.identifier.citation	Ayachi Omar A, Luchkin A.G, Alsayed Omar M.R, The Effect Magnet Design on Controlling the Target Erosion Profile for DC Magnetron with the Rectangular Target//Plasma Chemistry and Plasma Processing. - 2022. - Vol., Is.. - .	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/?p_id=272408	ru_RU
dc.description.abstract	Plasma Chemistry and Plasma Processing	ru_RU
dc.description.abstract	Anomalous erosion can happen, in the erosion sections of a rectangular target, resulting in, lower usage of the target. To determine the cause of anomalous erosion, we performed a series of simulations describing the strong and weak magnet field regions for all sections erosion. We found that no-uniform distribution of the magnetic field on the target surface causes the anomalous erosion. To make erosion profile more uniform, we proposed to improve magnets design. Through the 3D-simulation model, the approach of magnets design improvement is verified. We found that making the perpendicular magnetic field distribution more uniform within 10% on the erosion sections, the predicted erosion profile can be better controlled and made more uniform. The target erosion profile is predicted using a non-self-consistent particle simulation where tracing the complex trajectories of magnetized electrons within the magnetic trap and non-magnetized ions that naturally bombard the target surface. The obtained simulation results are consistent with the actual situation in the experimental results and measured data, at least in the relative sense correct in terms of normal erosion profiles, measurement of magnetic field strength on the target surface and erosion depth measurement. The model can provide the total mass lost from target, and service life. ? 2022, The Author(s), under exclusive licence to Springer Science+Business Media, LLC, part of Springer Nature.	ru_RU
dc.language.iso	ru	ru_RU
dc.subject	Erosion	ru_RU
dc.subject	Finite element method	ru_RU
dc.subject	Magnetic field	ru_RU
dc.subject	Magnetron sputtering	ru_RU
dc.subject	Monte Carlo simulation	ru_RU
dc.title	The Effect Magnet Design on Controlling the Target Erosion Profile for DC Magnetron with the Rectangular Target	ru_RU
dc.type	Статьи в зарубежных журналах и сборниках	ru_RU