КФУ. Карточка публикации. Effect of cooling system design on the heat dissipation of the magnetron sensitive components with rectangular target during sputtering by Ar+

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EFFECT OF COOLING SYSTEM DESIGN ON THE HEAT DISSIPATION OF THE MAGNETRON SENSITIVE COMPONENTS WITH RECTANGULAR TARGET DURING SPUTTERING BY AR+

Форма представления

Статьи в зарубежных журналах и сборниках

Год публикации

2022

Язык

английский

Авторы, сотрудники КФУ

Лучкин Александр Григорьевич, автор

Библиографическое описание на языке оригинала

Ayachi Omar A, Kashapov N.F, Luchkin A.G, Effect of cooling system design on the heat dissipation of the magnetron sensitive components with rectangular target during sputtering by Ar+//Results in Engineering. - 2022. - Vol.16, Is.. - Art. №100696.

Аннотация

The temperature of the magnetron-sensitive components should be kept below the threshold limit during sputtering. Overheating over the Curie-temperature of the magnets can occur if the heat generated in the magnetron is not sufficiently dissipated, causing the collapse of the entire sputtering process can occur. To ensure proper dissipation of the heat generated in the magnetron and understand the process, we proposed 3D model, through which we were able to model the process and determine the heat source on the surface of the target using Monte Carlo simulation. With the target being a heat source in the magnetron, using Computational fluid dynamics model with Fourier's-law, we simulated the heat transfer inside a magnetron and validated the simulation results by measuring the temperature using a thermal camera. Then we analyzed the heat fluxes and heat exchange with different cooling-water paths, and we explained their effect on the heat transfer inside a magnetron. The results indicate that according to the calculation criteria, an appropriate design must be selected that ensures that the cooling-water reaches the heat source to maximize heat dissipation and keep the temperature below the Curie-temperature level of the magnets. Engineers and researchers can use this model to optimize process efficiency and explore new designs, while at the same time reducing the need for costly experimental trials.

Ключевые слова

Erosion, Finite element method, Magnetic field, Magnetron sputtering, Monte Carlo simulation

Название журнала

Results in Engineering

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85140320684&doi=10.1016%2fj.rineng.2022.100696&partnerID=40&md5=52ea3d101ae286c7b7779f3cbc723deb

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https://repository.kpfu.ru/?p_id=272407

Полная запись метаданных

Поле DC	Значение	Язык
dc.contributor.author	Лучкин Александр Григорьевич	ru_RU
dc.date.accessioned	2022-01-01T00:00:00Z	ru_RU
dc.date.available	2022-01-01T00:00:00Z	ru_RU
dc.date.issued	2022	ru_RU
dc.identifier.citation	Ayachi Omar A, Kashapov N.F, Luchkin A.G, Effect of cooling system design on the heat dissipation of the magnetron sensitive components with rectangular target during sputtering by Ar+//Results in Engineering. - 2022. - Vol.16, Is.. - Art. №100696.	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/?p_id=272407	ru_RU
dc.description.abstract	Results in Engineering	ru_RU
dc.description.abstract	The temperature of the magnetron-sensitive components should be kept below the threshold limit during sputtering. Overheating over the Curie-temperature of the magnets can occur if the heat generated in the magnetron is not sufficiently dissipated, causing the collapse of the entire sputtering process can occur. To ensure proper dissipation of the heat generated in the magnetron and understand the process, we proposed 3D model, through which we were able to model the process and determine the heat source on the surface of the target using Monte Carlo simulation. With the target being a heat source in the magnetron, using Computational fluid dynamics model with Fourier's-law, we simulated the heat transfer inside a magnetron and validated the simulation results by measuring the temperature using a thermal camera. Then we analyzed the heat fluxes and heat exchange with different cooling-water paths, and we explained their effect on the heat transfer inside a magnetron. The results indicate that according to the calculation criteria, an appropriate design must be selected that ensures that the cooling-water reaches the heat source to maximize heat dissipation and keep the temperature below the Curie-temperature level of the magnets. Engineers and researchers can use this model to optimize process efficiency and explore new designs, while at the same time reducing the need for costly experimental trials.	ru_RU
dc.language.iso	ru	ru_RU
dc.subject	Erosion	ru_RU
dc.subject	Finite element method	ru_RU
dc.subject	Magnetic field	ru_RU
dc.subject	Magnetron sputtering	ru_RU
dc.subject	Monte Carlo simulation	ru_RU
dc.title	Effect of cooling system design on the heat dissipation of the magnetron sensitive components with rectangular target during sputtering by Ar+	ru_RU
dc.type	Статьи в зарубежных журналах и сборниках	ru_RU