Форма представления | Статьи в зарубежных журналах и сборниках |
Год публикации | 2014 |
|
Шемахин Александр Юрьевич, автор
|
Другие авторы |
V. S. Zheltukhin |
Библиографическое описание на языке оригинала |
V. S. Zheltukhin, A. Yu. Shemakhin. Simulation of RF plasma flowing at low pressure // Mathematical Models and Computer Simulations, 2014, Volume 6, Issue 1, pp 101-107
|
Аннотация |
A mathematical model that describes RF plasma flowing at a pressure of 13.3?133 Pa and a Knudsen number of 8 × 10−3 ≤ Kn ≤ 7 × 10−2 for the carrying gas is presented. The model is based on the statistical approach for a neutral plasma component and on a continuum model for electron and ion components. The results of the calculation for the neutral plasma component flowing in an undisturbed flow and, if the sample is in a circumfluent flow, are presented. The results of the calculation for the problem on an electron-ion gas are also given. |
Ключевые слова |
simulation, radio-frequency plasma, low pressure, jet flow, transient mode, Monte-Carlo method, statistical simulation |
Название журнала |
Mathematical Models and Computer Simulations
|
URL |
http://link.springer.com/article/10.1134%2FS2070048214010141#page-1 |
Пожалуйста, используйте этот идентификатор, чтобы цитировать или ссылаться на эту карточку |
https://repository.kpfu.ru/?p_id=86957 |
Полная запись метаданных |
Поле DC |
Значение |
Язык |
dc.contributor.author |
Шемахин Александр Юрьевич |
ru_RU |
dc.date.accessioned |
2014-01-01T00:00:00Z |
ru_RU |
dc.date.available |
2014-01-01T00:00:00Z |
ru_RU |
dc.date.issued |
2014 |
ru_RU |
dc.identifier.citation |
V. S. Zheltukhin, A. Yu. Shemakhin. Simulation of RF plasma flowing at low pressure // Mathematical Models and Computer Simulations, 2014, Volume 6, Issue 1, pp 101-107
|
ru_RU |
dc.identifier.uri |
https://repository.kpfu.ru/?p_id=86957 |
ru_RU |
dc.description.abstract |
Mathematical Models and Computer Simulations |
ru_RU |
dc.description.abstract |
A mathematical model that describes RF plasma flowing at a pressure of 13.3?133 Pa and a Knudsen number of 8 × 10−3 ≤ Kn ≤ 7 × 10−2 for the carrying gas is presented. The model is based on the statistical approach for a neutral plasma component and on a continuum model for electron and ion components. The results of the calculation for the neutral plasma component flowing in an undisturbed flow and, if the sample is in a circumfluent flow, are presented. The results of the calculation for the problem on an electron-ion gas are also given. |
ru_RU |
dc.language.iso |
ru |
ru_RU |
dc.subject |
simulation |
ru_RU |
dc.subject |
radio-frequency plasma |
ru_RU |
dc.subject |
low pressure |
ru_RU |
dc.subject |
jet flow |
ru_RU |
dc.subject |
transient mode |
ru_RU |
dc.subject |
Monte-Carlo method |
ru_RU |
dc.subject |
statistical simulation |
ru_RU |
dc.title |
Simulation of RF plasma flowing at low pressure |
ru_RU |
dc.type |
Статьи в зарубежных журналах и сборниках |
ru_RU |
|