KFU. Card publication. Abdullin I.Sh. Application of Low Pressure Radio-Frequency Plasmas forNanolayers Formation on the Surface of Construction Materials [Text] / I.Sh. Abdullin, I.R. Sagbiev, M.F.Shaekhov, R.F.Sharafeev, V.S.Zheltukhin // Proc. of International Conference 'Micro- and nanoelectronics - 2007' (ICMNE-2007). Zvenigorod, Russia. October 1-5, 2007. P. 234-237.

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ABDULLIN I.SH. APPLICATION OF LOW PRESSURE RADIO-FREQUENCY PLASMAS FORNANOLAYERS FORMATION ON THE SURFACE OF CONSTRUCTION MATERIALS [TEXT] / I.SH. ABDULLIN, I.R. SAGBIEV, M.F.SHAEKHOV, R.F.SHARAFEEV, V.S.ZHELTUKHIN // PROC. OF INTERNATIONAL CONFERENCE 'MICRO- AND NANOELECTRONICS - 2007' (ICMNE-2007). ZVENIGOROD, RUSSIA. OCTOBER 1-5, 2007. P. 234-237.

Form of presentation

Articles in Russian journals and collections

Year of publication

2007

Authors, employees of KFU

Zheltukhin Viktor Semenovich, author

Bibliographic description in the original language

Abdullin I.Sh. Application of Low Pressure Radio-Frequency Plasmas forNanolayers Formation on the Surface of Construction Materials [Text] / I.Sh. Abdullin, I.R. Sagbiev, M.F.Shaekhov, R.F.Sharafeev, V.S.Zheltukhin // Proc. of International Conference "Micro- and nanoelectronics - 2007" (ICMNE-2007). Zvenigorod, Russia. October 1-5, 2007. P. 234-237.

Annotation

Proc. of International Conference "Micro- and nanoelectronics 2007" (ICMNE-2007)

Place of publication

��

The name of the journal

Proc. of International Conference "Micro- and nanoelectronics 2007" (ICMNE-2007)

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=11157&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Zheltukhin Viktor Semenovich	ru_RU
dc.date.accessioned	2007-01-01T00:00:00Z	ru_RU
dc.date.available	2007-01-01T00:00:00Z	ru_RU
dc.date.issued	2007	ru_RU
dc.identifier.citation	Abdullin I.Sh. Application of Low Pressure Radio-Frequency Plasmas forNanolayers Formation on the Surface of Construction Materials [Text] / I.Sh. Abdullin, I.R. Sagbiev, M.F.Shaekhov, R.F.Sharafeev, V.S.Zheltukhin // Proc. of International Conference "Micro- and nanoelectronics - 2007" (ICMNE-2007). Zvenigorod, Russia. October 1-5, 2007. P. 234-237.	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=11157&p_lang=2	ru_RU
dc.description.abstract	Proc. of International Conference "Micro- and nanoelectronics 2007" (ICMNE-2007)	ru_RU
dc.description.abstract	Proc. of International Conference "Micro- and nanoelectronics 2007" (ICMNE-2007)	ru_RU
dc.language.iso	ru	ru_RU
dc.title	Abdullin I.Sh. Application of Low Pressure Radio-Frequency Plasmas forNanolayers Formation on the Surface of Construction Materials [Text] / I.Sh. Abdullin, I.R. Sagbiev, M.F.Shaekhov, R.F.Sharafeev, V.S.Zheltukhin // Proc. of International Conference "Micro- and nanoelectronics - 2007" (ICMNE-2007). Zvenigorod, Russia. October 1-5, 2007. P. 234-237.	ru_RU
dc.type	Articles in Russian journals and collections	ru_RU