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Kazan (Volga region) Federal University, KFU
KAZAN
FEDERAL UNIVERSITY
 
MAGNETRON DISCHARGE VOLT-AMPERE CHARACTERISTIC INVESTIGATION AT THIN FILM COATING PROCESS
Form of presentationArticles in international journals and collections
Year of publication2014
Языканглийский
    Authors, employees of KFU
  • Kashapov Nail Faikovich, author
  • Luchkin Aleksandr Grigorevich, author
  • Luchkin Grigoriy Sergeevich, author
    • Bibliographic description in the original language Luchkin, G.S. Magnetron discharge volt-ampere characteristic investigation at thin film coating process/Luchkin, A.G., Kashapov, N.F. IOP Conference Series: Material Sciences and Engineering Vol. 69, Issue 1, 2014, Article number 012030
    Annotation IOP Conference Series: Material Sciences and Engineering
    Keywords Магнетрон, пленки, разряд
    The name of the journal IOP Conference Series: Material Sciences and Engineering
    URL http://www.ingentaconnect.com/content/iop/mse/2014/00000069/00000001/art012030
    Please use this ID to quote from or refer to the card https://repository.kpfu.ru/eng/?p_id=125464&p_lang=2

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