KFU. Card publication. Thick and thin film SiCN for pressure sensor at high temperature and influence of temperature on mechanical properties

KAZAN
FEDERAL UNIVERSITY

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THICK AND THIN FILM SICN FOR PRESSURE SENSOR AT HIGH TEMPERATURE AND INFLUENCE OF TEMPERATURE ON MECHANICAL PROPERTIES

Form of presentation

Articles in international journals and collections

Year of publication

2010

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Authors, employees of KFU

Andronenko Sergey Ivanovich, author

Bibliographic description in the original language

Alfin Leo. Thick and thin film SiCN for pressure sensor at high temperature and influence of temperature on mechanical properties/Alfin Leo, Sergey Andronenko, Ion Stiharu and Rama B. Bhat // Sensors -2010. -V.10(2). -P.1338-1354.

Keywords

SiCN, nanoceramics, thin films

The name of the journal

SENSORS-BASEL

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=138446&p_lang=2

Resource files

File name	Size (MB)	Format
Sensors2010.pdf	0,83	pdf	show / download

Full metadata record

Field DC	Value	Language
dc.contributor.author	Andronenko Sergey Ivanovich	ru_RU
dc.date.accessioned	2010-01-01T00:00:00Z	ru_RU
dc.date.available	2010-01-01T00:00:00Z	ru_RU
dc.date.issued	2010	ru_RU
dc.identifier.citation	Alfin Leo. Thick and thin film SiCN for pressure sensor at high temperature and influence of temperature on mechanical properties/Alfin Leo, Sergey Andronenko, Ion Stiharu and Rama B. Bhat // Sensors -2010. -V.10(2). -P.1338-1354.	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=138446&p_lang=2	ru_RU
dc.description.abstract	SENSORS-BASEL	ru_RU
dc.language.iso	ru	ru_RU
dc.subject	SiCN	ru_RU
dc.subject	nanoceramics	ru_RU
dc.subject	thin films	ru_RU
dc.title	Thick and thin film SiCN for pressure sensor at high temperature and influence of temperature on mechanical properties	ru_RU
dc.type	Articles in international journals and collections	ru_RU