KFU. Card publication. Capacitive coupled RF discharge: Modelling at the local statement of the problem

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FEDERAL UNIVERSITY

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CAPACITIVE COUPLED RF DISCHARGE: MODELLING AT THE LOCAL STATEMENT OF THE PROBLEM

Form of presentation

Articles in international journals and collections

Year of publication

2017

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Authors, employees of KFU

Badriev Ildar Burkhanovich, author

Zheltukhin Viktor Semenovich, author

Chebakova Violetta Yurevna, author

Bibliographic description in the original language

Badriev I.B, Chebakova V.Y, Zheltukhin V.S., Capacitive coupled RF discharge: Modelling at the local statement of the problem//Journal of Physics: Conference Series. - 2017. - Vol.789, Is.1. - Art. � 012004.

Keywords

Capacitive coupled RF discharge

The name of the journal

Journal of Physics: Conference Series

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85014627586&doi=10.1088%2f1742-6596%2f789%2f1%2f012004&partnerID=40&md5=1682ca450d52e2047149f690d1c0f2d7

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=159462&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Badriev Ildar Burkhanovich	ru_RU
dc.contributor.author	Zheltukhin Viktor Semenovich	ru_RU
dc.contributor.author	Chebakova Violetta Yurevna	ru_RU
dc.date.accessioned	2017-01-01T00:00:00Z	ru_RU
dc.date.available	2017-01-01T00:00:00Z	ru_RU
dc.date.issued	2017	ru_RU
dc.identifier.citation	Badriev I.B, Chebakova V.Y, Zheltukhin V.S., Capacitive coupled RF discharge: Modelling at the local statement of the problem//Journal of Physics: Conference Series. - 2017. - Vol.789, Is.1. - Art. � 012004.	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=159462&p_lang=2	ru_RU
dc.description.abstract	Journal of Physics: Conference Series	ru_RU
dc.language.iso	ru	ru_RU
dc.subject		ru_RU
dc.title	Capacitive coupled RF discharge: Modelling at the local statement of the problem	ru_RU
dc.type	Articles in international journals and collections	ru_RU