KFU. Card publication. Mathematical modelling of RF plasma flow with metastable atoms at low pressure

KAZAN
FEDERAL UNIVERSITY

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MATHEMATICAL MODELLING OF RF PLASMA FLOW WITH METASTABLE ATOMS AT LOW PRESSURE

Form of presentation

Conference proceedings in Russian journals and collections

Year of publication

2017

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Authors, employees of KFU

Shemakhin Aleksandr Yurevich, author

Other authors

Zheltukhin Viktor Semenovich, author

Bibliographic description in the original language

Shemakhin A.Yu., Zheltukhin V.S. Mathematical modelling of RF plasma flow with metastable atoms at low pressure// Sbornik tezisov mezhdunarodnoy konferencii «Interaction of Intense Energy Fluxes with Matter«, 2017.- C.96

Annotation

�� "Interaction of Intense Energy Fluxes with Matter", 2017 �.

Keywords

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The name of the journal

�� "Interaction of Intense Energy Fluxes with Matter", 2017 �.

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=163828&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Shemakhin Aleksandr Yurevich	ru_RU
dc.contributor.author	Zheltukhin Viktor Semenovich	ru_RU
dc.date.accessioned	2017-01-01T00:00:00Z	ru_RU
dc.date.available	2017-01-01T00:00:00Z	ru_RU
dc.date.issued	2017	ru_RU
dc.identifier.citation	Shemakhin A.Yu., Zheltukhin V.S. Mathematical modelling of RF plasma flow with metastable atoms at low pressure// �� «Interaction of Intense Energy Fluxes with Matter«, 2017.- C.96	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=163828&p_lang=2	ru_RU
dc.description.abstract	�� "Interaction of Intense Energy Fluxes with Matter", 2017 �.	ru_RU
dc.language.iso	ru	ru_RU
dc.subject	��	ru_RU
dc.subject	��-��	ru_RU
dc.subject	��	ru_RU
dc.subject	��	ru_RU
dc.title	Mathematical modelling of RF plasma flow with metastable atoms at low pressure	ru_RU
dc.type	Conference proceedings in Russian journals and collections	ru_RU