KFU. Card publication. Electrical properties of titanium nitride films synthesized by reactive magnetron sputtering

KAZAN
FEDERAL UNIVERSITY

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- 中文
- ES

ELECTRICAL PROPERTIES OF TITANIUM NITRIDE FILMS SYNTHESIZED BY REACTIVE MAGNETRON SPUTTERING

Form of presentation

Conference proceedings in Russian journals and collections

Year of publication

2017

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Authors, employees of KFU

Vakhitov Iskander Rashidovich, author

Gumarov Amir Ildusovich, author

Nikitin Sergey Ivanovich, author

Tagirov Lenar Rafgatovich, author

Yusupov Roman Valerevich, author

Yanilkin Igor Vitalevich, author

Authors, postgraduates KFU

Mokhammed Vael Mokhammed Makhmud, postgraduate kfu

Bibliographic description in the original language

Mohammed W.M. Electrical properties of titanium nitride films synthesized by reactive magnetron sputtering / W.M. Mohammed, A.I. Gumarov, I.R. Vakhitov, I.V. Yanilkin, S.I. Nikitin, L.R. Tagirov, R.V. Yusupov // Fizika nizkotemperaturnoy plazmy: vserossiyskaya (s mezhdunarodnym uchastiem) konferenciya: - Kazan: izd-vo ?Otechestvo?, 2017. - 264 s.

Keywords

Titanium nitride, film, magnetron sputtering

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=164827&p_lang=2

Resource files

File name	Size (MB)	Format
LTP_2017_abstracts.pdf	0,40	pdf	show / download

Full metadata record

Field DC	Value	Language
dc.contributor.author	Vakhitov Iskander Rashidovich	ru_RU
dc.contributor.author	Gumarov Amir Ildusovich	ru_RU
dc.contributor.author	Nikitin Sergey Ivanovich	ru_RU
dc.contributor.author	Tagirov Lenar Rafgatovich	ru_RU
dc.contributor.author	Yusupov Roman Valerevich	ru_RU
dc.contributor.author	Yanilkin Igor Vitalevich	ru_RU
dc.contributor.author	Mokhammed Vael Mokhammed Makhmud	ru_RU
dc.date.accessioned	2017-01-01T00:00:00Z	ru_RU
dc.date.available	2017-01-01T00:00:00Z	ru_RU
dc.date.issued	2017	ru_RU
dc.identifier.citation	Mohammed W.M. Electrical properties of titanium nitride films synthesized by reactive magnetron sputtering / W.M. Mohammed, A.I. Gumarov, I.R. Vakhitov, I.V. Yanilkin, S.I. Nikitin, L.R. Tagirov, R.V. Yusupov // �� : �� (� �� ) ��: - ��: ��-�� ?��?, 2017. - 264 �.	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=164827&p_lang=2	ru_RU
dc.language.iso	ru	ru_RU
dc.subject	Titanium nitride	ru_RU
dc.subject	film	ru_RU
dc.subject	magnetron sputtering	ru_RU
dc.title	Electrical properties of titanium nitride films synthesized by reactive magnetron sputtering	ru_RU
dc.type	Conference proceedings in Russian journals and collections	ru_RU