Kazan (Volga region) Federal University, KFU
KAZAN
FEDERAL UNIVERSITY
 
PULSED LASER ANNEALING OF HIGH-DOSE AG+-ION IMPLANTED SI LAYER
Form of presentationArticles in international journals and collections
Year of publication2017
Языканглийский
  • Osin Yuriy Nikolaevich, author
  • Stepanov Andrey Lvovich, author
  • Batalov R. I., author
  • Valeev V. F., author
  • Ivleev G. , author
  • Nuzhdin V. I., author
  • Vorobev Vyacheslav Valerevich, postgraduate kfu
  • Bibliographic description in the original language R I Batalov Pulsed laser annealing of high-dose Ag+-ion implanted Si layer / R I Batalov, V I Nuzhdin, V F Valeev, V V Vorobev, Yu N Osin, G D Ivlev and A L Stepanov// Journal of Physics D: Applied Physics, Volume 51, Number 1, -2017
    Annotation Journal of Physics D: Applied Physics
    Keywords silicon, silver nanoparticles, ion implantation, pulsed laser annealing, melting, crystallization, plasmon resonance
    The name of the journal Journal of Physics D: Applied Physics
    Please use this ID to quote from or refer to the card https://repository.kpfu.ru/eng/?p_id=169470&p_lang=2

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