KFU. Card publication. Mathematical modelling of RF plasma flow at low pressure with electrodynamics

KAZAN
FEDERAL UNIVERSITY

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MATHEMATICAL MODELLING OF RF PLASMA FLOW AT LOW PRESSURE WITH ELECTRODYNAMICS

Form of presentation

Articles in international journals and collections

Year of publication

2017

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Authors, employees of KFU

Zheltukhin Viktor Semenovich, author

Shemakhin Aleksandr Yurevich, author

Bibliographic description in the original language

Shemakhin A.Y, Zheltukhin V.S., Mathematical modelling of RF plasma flow at low pressure with electrodynamics//Journal of Physics: Conference Series. - 2017. - Vol.927, Is.1. - Art. ¹ 012055.

Keywords

mathematical modeling, gas-dynamics, rf plasma, low pressure, plasma flow, electrodynamics

The name of the journal

Journal of Physics: Conference Series

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85037695102&doi=10.1088%2f1742-6596%2f927%2f1%2f012055&partnerID=40&md5=239c51e895d42ae931efd0ca026a52bf

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=173605&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Zheltukhin Viktor Semenovich	ru_RU
dc.contributor.author	Shemakhin Aleksandr Yurevich	ru_RU
dc.date.accessioned	2017-01-01T00:00:00Z	ru_RU
dc.date.available	2017-01-01T00:00:00Z	ru_RU
dc.date.issued	2017	ru_RU
dc.identifier.citation	Shemakhin A.Y, Zheltukhin V.S., Mathematical modelling of RF plasma flow at low pressure with electrodynamics//Journal of Physics: Conference Series. - 2017. - Vol.927, Is.1. - Art. ¹ 012055.	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=173605&p_lang=2	ru_RU
dc.description.abstract	Journal of Physics: Conference Series	ru_RU
dc.language.iso	ru	ru_RU
dc.subject	mathematical modeling	ru_RU
dc.subject	gas-dynamics	ru_RU
dc.subject	rf plasma	ru_RU
dc.subject	low pressure	ru_RU
dc.subject	plasma flow	ru_RU
dc.subject	electrodynamics	ru_RU
dc.title	Mathematical modelling of RF plasma flow at low pressure with electrodynamics	ru_RU
dc.type	Articles in international journals and collections	ru_RU