| Form of presentation | Articles in international journals and collections |
| Year of publication | 2018 |
| Язык | английский |
|
Askhatov Radik Mukhametgaleevich, author
Badriev Ildar Burkhanovich, author
Zheltukhin Viktor Semenovich, author
Chebakova Violetta Yurevna, author
|
| Bibliographic description in the original language |
Askhatov R.M, Badriev I.B, Chebakova V.Yu, Zheltukhin V.S. Simulation of electron moving in RF capacitively coupled discharge//Journal of Physics: Conference Series. - 2018. - Vol.1058, Is.1. - Art. № 012044. |
| Keywords |
Simulation |
| The name of the journal |
Journal of Physics: Conference Series
|
| URL |
https://www.scopus.com/inward/record.uri?eid=2-s2.0-85051859166&doi=10.1088%2f1742-6596%2f1058%2f1%2f012044&partnerID=40&md5=e60751291c079c3466a4eceebd1e03a8 |
| Please use this ID to quote from or refer to the card |
https://repository.kpfu.ru/eng/?p_id=185662&p_lang=2 |
Full metadata record  |
| Field DC |
Value |
Language |
| dc.contributor.author |
Askhatov Radik Mukhametgaleevich |
ru_RU |
| dc.contributor.author |
Badriev Ildar Burkhanovich |
ru_RU |
| dc.contributor.author |
Zheltukhin Viktor Semenovich |
ru_RU |
| dc.contributor.author |
Chebakova Violetta Yurevna |
ru_RU |
| dc.date.accessioned |
2018-01-01T00:00:00Z |
ru_RU |
| dc.date.available |
2018-01-01T00:00:00Z |
ru_RU |
| dc.date.issued |
2018 |
ru_RU |
| dc.identifier.citation |
Askhatov R.M, Badriev I.B, Chebakova V.Yu, Zheltukhin V.S. Simulation of electron moving in RF capacitively coupled discharge//Journal of Physics: Conference Series. - 2018. - Vol.1058, Is.1. - Art. № 012044. |
ru_RU |
| dc.identifier.uri |
https://repository.kpfu.ru/eng/?p_id=185662&p_lang=2 |
ru_RU |
| dc.description.abstract |
Journal of Physics: Conference Series |
ru_RU |
| dc.language.iso |
ru |
ru_RU |
| dc.subject |
|
ru_RU |
| dc.title |
Simulation of electron moving in RF capacitively coupled discharge |
ru_RU |
| dc.type |
Articles in international journals and collections |
ru_RU |
|
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