Kazan (Volga region) Federal University, KFU
KAZAN
FEDERAL UNIVERSITY
 
MATHEMATICAL MODELLING OF RF PLASMA FLOW AT LOW PRESSURE WITH METASTABLE AND ELECTRODYNAMICS
Form of presentationArticles in international journals and collections
Year of publication2019
Языканглийский
  • Zheltukhin Viktor Semenovich, author
  • Shemakhin Aleksandr Yurevich, author
  • Bibliographic description in the original language Zheltukhin V.S, Shemakhin A.Y., Mathematical modelling of RF plasma flow at low pressure with metastable and electrodynamics//Journal of Physics: Conference Series. - 2019. - Vol.1158, Is.4. - Art. № 042044.
    Keywords RF plasma, low pressure, mathematical modelling
    The name of the journal Journal of Physics: Conference Series
    URL https://www.scopus.com/inward/record.uri?eid=2-s2.0-85063788752&doi=10.1088%2f1742-6596%2f1158%2f4%2f042044&partnerID=40&md5=4d0642c0fa5dc0f80e8d460c6b58164f
    Please use this ID to quote from or refer to the card https://repository.kpfu.ru/eng/?p_id=217357&p_lang=2

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