KFU. Card publication. Mathematical modelling of RF plasma flow at low pressure with metastable and electrodynamics

KAZAN
FEDERAL UNIVERSITY

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MATHEMATICAL MODELLING OF RF PLASMA FLOW AT LOW PRESSURE WITH METASTABLE AND ELECTRODYNAMICS

Form of presentation

Articles in international journals and collections

Year of publication

2019

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Authors, employees of KFU

Shemakhin Aleksandr Yurevich, author

Bibliographic description in the original language

Zheltukhin V.S, Shemakhin A.Y., Mathematical modelling of RF plasma flow at low pressure with metastable and electrodynamics//Journal of Physics: Conference Series. - 2019. - Vol.1158, Is.4. - Art. � 042044.

Keywords

RF plasma, low pressure, mathematical modelling

The name of the journal

Journal of Physics: Conference Series

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85063788752&doi=10.1088%2f1742-6596%2f1158%2f4%2f042044&partnerID=40&md5=4d0642c0fa5dc0f80e8d460c6b58164f

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=217357&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Shemakhin Aleksandr Yurevich	ru_RU
dc.date.accessioned	2019-01-01T00:00:00Z	ru_RU
dc.date.available	2019-01-01T00:00:00Z	ru_RU
dc.date.issued	2019	ru_RU
dc.identifier.citation	Zheltukhin V.S, Shemakhin A.Y., Mathematical modelling of RF plasma flow at low pressure with metastable and electrodynamics//Journal of Physics: Conference Series. - 2019. - Vol.1158, Is.4. - Art. � 042044.	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=217357&p_lang=2	ru_RU
dc.description.abstract	Journal of Physics: Conference Series	ru_RU
dc.language.iso	ru	ru_RU
dc.subject	RF plasma	ru_RU
dc.subject	low pressure	ru_RU
dc.subject	mathematical modelling	ru_RU
dc.title	Mathematical modelling of RF plasma flow at low pressure with metastable and electrodynamics	ru_RU
dc.type	Articles in international journals and collections	ru_RU