KFU. Card publication. Formation of porous germanium layers with various surface morphology in dependence on mass of implanted ions

KAZAN
FEDERAL UNIVERSITY

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FORMATION OF POROUS GERMANIUM LAYERS WITH VARIOUS SURFACE MORPHOLOGY IN DEPENDENCE ON MASS OF IMPLANTED IONS

Form of presentation

Articles in international journals and collections

Year of publication

2020

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Authors, employees of KFU

Rogov Aleksey Mikhaylovich, author

Bibliographic description in the original language

Rogov A.M, Nuzhdin V.I, Valeev V.F, Formation of porous germanium layers with various surface morphology in dependence on mass of implanted ions//Composites Communications. - 2020. - Vol.19, Is.. - P.6-10.

Keywords

semiconductors, microscopy, ion implantation

The name of the journal

Composites Communications

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85079378546&doi=10.1016%2fj.coco.2020.01.002&partnerID=40&md5=555380700e506232d4035bc6295352b4

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=236950&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Rogov Aleksey Mikhaylovich	ru_RU
dc.date.accessioned	2020-01-01T00:00:00Z	ru_RU
dc.date.available	2020-01-01T00:00:00Z	ru_RU
dc.date.issued	2020	ru_RU
dc.identifier.citation	Rogov A.M, Nuzhdin V.I, Valeev V.F, Formation of porous germanium layers with various surface morphology in dependence on mass of implanted ions//Composites Communications. - 2020. - Vol.19, Is.. - P.6-10.	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=236950&p_lang=2	ru_RU
dc.description.abstract	Composites Communications	ru_RU
dc.language.iso	ru	ru_RU
dc.subject	semiconductors	ru_RU
dc.subject	microscopy	ru_RU
dc.subject	ion implantation	ru_RU
dc.title	Formation of porous germanium layers with various surface morphology in dependence on mass of implanted ions	ru_RU
dc.type	Articles in international journals and collections	ru_RU