KFU. Card publication. Mathematical Simulation of a High-Frequency Low-Pressure Discharge with Gas Injection in Non-Local Approximation: Electro- and Plasmadynamics

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MATHEMATICAL SIMULATION OF A HIGH-FREQUENCY LOW-PRESSURE DISCHARGE WITH GAS INJECTION IN NON-LOCAL APPROXIMATION: ELECTRO- AND PLASMADYNAMICS

Form of presentation

Articles in international journals and collections

Year of publication

2021

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Authors, employees of KFU

Zheltukhin Viktor Semenovich, author

Shemakhin Aleksandr Yurevich, author

Bibliographic description in the original language

Shemakhin A.Y, Zheltukhin V.S, Shemakhin E.Y., Mathematical Simulation of a High-Frequency Low-Pressure Discharge with Gas Injection in Non-Local Approximation: Electro- and Plasmadynamics//Journal of Engineering Physics and Thermophysics. - 2021. - Vol.94, Is.5. - P.1336-1343.

Keywords

RF plasma, low pressure, mathematical modeling

The name of the journal

Journal of Engineering Physics and Thermophysics

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85118218417&doi=10.1007%2fs10891-021-02415-5&partnerID=40&md5=963e59bedf936294d3d5fe993f2c9ab7

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=259984&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Zheltukhin Viktor Semenovich	ru_RU
dc.contributor.author	Shemakhin Aleksandr Yurevich	ru_RU
dc.date.accessioned	2021-01-01T00:00:00Z	ru_RU
dc.date.available	2021-01-01T00:00:00Z	ru_RU
dc.date.issued	2021	ru_RU
dc.identifier.citation	Shemakhin A.Y, Zheltukhin V.S, Shemakhin E.Y., Mathematical Simulation of a High-Frequency Low-Pressure Discharge with Gas Injection in Non-Local Approximation: Electro- and Plasmadynamics//Journal of Engineering Physics and Thermophysics. - 2021. - Vol.94, Is.5. - P.1336-1343.	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=259984&p_lang=2	ru_RU
dc.description.abstract	Journal of Engineering Physics and Thermophysics	ru_RU
dc.language.iso	ru	ru_RU
dc.subject	RF plasma	ru_RU
dc.subject	low pressure	ru_RU
dc.subject	mathematical modeling	ru_RU
dc.title	Mathematical Simulation of a High-Frequency Low-Pressure Discharge with Gas Injection in Non-Local Approximation: Electro- and Plasmadynamics	ru_RU
dc.type	Articles in international journals and collections	ru_RU