KFU. Card publication. Influence of oxygen fraction on the characteristics of titanium oxide coatings obtained by the magnetron method

KAZAN
FEDERAL UNIVERSITY

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INFLUENCE OF OXYGEN FRACTION ON THE CHARACTERISTICS OF TITANIUM OXIDE COATINGS OBTAINED BY THE MAGNETRON METHOD

Form of presentation

Articles in international journals and collections

Year of publication

2021

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Authors, employees of KFU

Sabitov Linar Salikhzanovich, author

Bibliographic description in the original language

Vashchilin V.S, Krivinozhko E.V, Sabitov L.S, Influence of oxygen fraction on the characteristics of titanium oxide coatings obtained by the magnetron method//Journal of Physics: Conference Series. - 2021. - Vol.2124, Is.1. - Art. �012025.

Keywords

oxygen

The name of the journal

Journal of Physics: Conference Series

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85123401890&doi=10.1088%2f1742-6596%2f2124%2f1%2f012025&partnerID=40&md5=3f3f3b120511c203ead3bfc3c353ab1c

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=265333&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Sabitov Linar Salikhzanovich	ru_RU
dc.date.accessioned	2021-01-01T00:00:00Z	ru_RU
dc.date.available	2021-01-01T00:00:00Z	ru_RU
dc.date.issued	2021	ru_RU
dc.identifier.citation	Vashchilin V.S, Krivinozhko E.V, Sabitov L.S, Influence of oxygen fraction on the characteristics of titanium oxide coatings obtained by the magnetron method//Journal of Physics: Conference Series. - 2021. - Vol.2124, Is.1. - Art. �012025.	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=265333&p_lang=2	ru_RU
dc.description.abstract	Journal of Physics: Conference Series	ru_RU
dc.language.iso	ru	ru_RU
dc.subject		ru_RU
dc.title	Influence of oxygen fraction on the characteristics of titanium oxide coatings obtained by the magnetron method	ru_RU
dc.type	Articles in international journals and collections	ru_RU