KFU. Card publication. Experimental installation for study the low-power ICRF plasma at low pressures with equipment for experiment data synchronization

EXPERIMENTAL INSTALLATION FOR STUDY THE LOW-POWER ICRF PLASMA AT LOW PRESSURES WITH EQUIPMENT FOR EXPERIMENT DATA SYNCHRONIZATION

Form of presentation

Articles in international journals and collections

Year of publication

2022

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Authors, employees of KFU

Terentev Timur Nikolaevich, author

Other authors

Zheltukhin V S, author

Bibliographic description in the original language

T N Terentev et al 2022 J. Phys.: Conf. Ser. 2270 012014

Annotation

Journal of Physics: Conference Series

Keywords

cold RF plasma, capacitive coupled plasma, inductive coupled plasma

The name of the journal

Journal of Physics: Conference Series

URL

https://doi.org/10.1088/1742-6596/2270/1/012014

Please use this ID to quote from or refer to the card

Resource files

File name	Size (MB)	Format
Terentev_2022_J._Phys.__Conf._Ser._2270_012014.pdf	0,52	pdf	show / download

Field DC	Value	Language
dc.contributor.author	Terentev Timur Nikolaevich	ru_RU
dc.contributor.author	Shemakhin Aleksandr Yurevich	ru_RU
dc.contributor.author	Shemakhin Evgeniy Yurevich	ru_RU
dc.contributor.author	Zheltukhin V S	ru_RU
dc.date.accessioned	2022-01-01T00:00:00Z	ru_RU
dc.date.available	2022-01-01T00:00:00Z	ru_RU
dc.date.issued	2022	ru_RU
dc.identifier.citation	T N Terentev et al 2022 J. Phys.: Conf. Ser. 2270 012014	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=267180&p_lang=2	ru_RU
dc.description.abstract	Journal of Physics: Conference Series	ru_RU
dc.description.abstract	Abstract. An installation for numerical and experimental studies of low-pressure radio frequency plasma for surface modification of functional materials with equipment for data synchronization are presented. The equipment for data synchronization as well as intermediate results for plasma generation are showed.	ru_RU
dc.language.iso	ru	ru_RU
dc.subject	cold RF plasma	ru_RU
dc.subject	capacitive coupled plasma	ru_RU
dc.subject	inductive coupled plasma	ru_RU
dc.title	Experimental installation for study the low-power ICRF plasma at low pressures with equipment for experiment data synchronization	ru_RU
dc.type	Articles in international journals and collections	ru_RU