KFU. Card publication. Spectral studies of inductively coupled plasma characteristics of low pressure discharges for two configurations of vacuum chambers

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SPECTRAL STUDIES OF INDUCTIVELY COUPLED PLASMA CHARACTERISTICS OF LOW PRESSURE DISCHARGES FOR TWO CONFIGURATIONS OF VACUUM CHAMBERS

Form of presentation

Articles in international journals and collections

Year of publication

2022

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Authors, employees of KFU

Tyurin Vladimir Aleksandrovich, author

Fadeev Sergey Alekseevich, author

Shemakhin Aleksandr Yurevich, author

Bibliographic description in the original language

Shemakhin Yu.A, Samsonova E.S, Voznesenskiy E.F, Spectral studies of inductively coupled plasma characteristics of low pressure discharges for two configurations of vacuum chambers//Journal of Physics: Conference Series. - 2022. - Vol.2270, Is.1. - Art. �012007.

Keywords

RF plasma, spectral studies, low pressure

The name of the journal

Journal of Physics: Conference Series

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85131869171&doi=10.1088%2f1742-6596%2f2270%2f1%2f012007&partnerID=40&md5=972982cdf5b9e153ff820939e13ef1a5

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=270266&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Tyurin Vladimir Aleksandrovich	ru_RU
dc.contributor.author	Fadeev Sergey Alekseevich	ru_RU
dc.contributor.author	Shemakhin Aleksandr Yurevich	ru_RU
dc.date.accessioned	2022-01-01T00:00:00Z	ru_RU
dc.date.available	2022-01-01T00:00:00Z	ru_RU
dc.date.issued	2022	ru_RU
dc.identifier.citation	Shemakhin Yu.A, Samsonova E.S, Voznesenskiy E.F, Spectral studies of inductively coupled plasma characteristics of low pressure discharges for two configurations of vacuum chambers//Journal of Physics: Conference Series. - 2022. - Vol.2270, Is.1. - Art. �012007.	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=270266&p_lang=2	ru_RU
dc.description.abstract	Journal of Physics: Conference Series	ru_RU
dc.language.iso	ru	ru_RU
dc.subject	RF plasma	ru_RU
dc.subject	spectral studies	ru_RU
dc.subject	low pressure	ru_RU
dc.title	Spectral studies of inductively coupled plasma characteristics of low pressure discharges for two configurations of vacuum chambers	ru_RU
dc.type	Articles in international journals and collections	ru_RU