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Kazan (Volga region) Federal University, KFU
KAZAN
FEDERAL UNIVERSITY
 
A MATHEMATICAL MODEL OF AN INDUCTIVELY COUPLED RADIO-FREQUENCY DISCHARGE AT LOW PRESSURE AS NONLINEAR PARTIAL EIGENPROBLEM
Form of presentationArticles in international journals and collections
Year of publication2022
Языканглийский
    Authors, employees of KFU
  • Zheltukhin Viktor Semenovich, author
  • Shemakhin Aleksandr Yurevich, author
    • Bibliographic description in the original language Shemakhin A.Yu, Zheltukhin V.S, Shemakhin E.Yu, A mathematical model of an inductively coupled radio-frequency discharge at low pressure as nonlinear partial eigenproblem//Journal of Physics: Conference Series. - 2022. - Vol.2388, Is.1. - Art. №012050.
    Keywords ВЧ-плазма, пониженное давление, математическое моделирование
    The name of the journal Journal of Physics: Conference Series
    URL https://www.scopus.com/inward/record.uri?eid=2-s2.0-85145185510&doi=10.1088%2f1742-6596%2f2388%2f1%2f012050&partnerID=40&md5=bf383da4792f8695fb1b56e058e07102
    Please use this ID to quote from or refer to the card https://repository.kpfu.ru/eng/?p_id=278829&p_lang=2

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