KFU. Card publication. Chebakova V.,Zheltukhin V., Sheneider M.Simulation of lowered pressure capacity coupled radio-frequency discharge at big interelectrode distances//14th israel conference on Plasma Science and Applications 28.02.2012

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CHEBAKOVA V.,ZHELTUKHIN V., SHENEIDER M.SIMULATION OF LOWERED PRESSURE CAPACITY COUPLED RADIO-FREQUENCY DISCHARGE AT BIG INTERELECTRODE DISTANCES//14TH ISRAEL CONFERENCE ON PLASMA SCIENCE AND APPLICATIONS 28.02.2012

Form of presentation

Articles in international journals and collections

Year of publication

2012

Authors, employees of KFU

Zheltukhin Viktor Semenovich, author

Chebakova Violetta Yurevna, author

Bibliographic description in the original language

Chebakova V.,Zheltukhin V., Sheneider M.Simulation of lowered pressure capacity coupled radio-frequency discharge at big interelectrode distances//14th israel conference on Plasma Science and Applications 28.02.2012

Annotation

14th israel conference on Plasma Science and Applications

The name of the journal

14th israel conference on Plasma Science and Applications

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=53082&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Zheltukhin Viktor Semenovich	ru_RU
dc.contributor.author	Chebakova Violetta Yurevna	ru_RU
dc.date.accessioned	2012-01-01T00:00:00Z	ru_RU
dc.date.available	2012-01-01T00:00:00Z	ru_RU
dc.date.issued	2012	ru_RU
dc.identifier.citation	Chebakova V.,Zheltukhin V., Sheneider M.Simulation of lowered pressure capacity coupled radio-frequency discharge at big interelectrode distances//14th israel conference on Plasma Science and Applications 28.02.2012	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=53082&p_lang=2	ru_RU
dc.description.abstract	14th israel conference on Plasma Science and Applications	ru_RU
dc.description.abstract	14th israel conference on Plasma Science and Applications	ru_RU
dc.language.iso	ru	ru_RU
dc.title	Chebakova V.,Zheltukhin V., Sheneider M.Simulation of lowered pressure capacity coupled radio-frequency discharge at big interelectrode distances//14th israel conference on Plasma Science and Applications 28.02.2012	ru_RU
dc.type	Articles in international journals and collections	ru_RU